| 摘要 |
<p>PROBLEM TO BE SOLVED: To efficiently treat DMSO(dimethylsulfoxide)-containing water. SOLUTION: A treatment apparatus of DMSO-containing water is equipped with a first treatment means, a second treatment means and a gas treatment means. DMSO is reduced to DMS, H2S and MM by a reducing agent adding means of the first treatment means and formed DMS, H2S and MM are oxidized by a hydrogen peroxide adding means of the second treatment means to be decomposed up to sulfate ions. Treatment equipment of waste water from a semiconductor factory is equipped with the first treatment means 1 for adding the reducing agent to DMSO-containing waste water and the second treatment means 7 for bringing the treated water from the reducing agent adding means into contact with hydrogen peroxide-containing waste water.</p> |
