| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a highly reliable flow rate sensor by enhancing a strength of a diaphragm of a flow rate detection element. SOLUTION: Diaphragms 13a-13c for detecting a flow rate are arranged in a direction orthogonal to a flow direction A of a fluid to be measured. Each of the diaphragms 13a-13c is formed to have a longer side of a length longer by two times or more than a length of a shorter side, and is arranged so that the longer side is in parallel to the flow direction A of the fluid to be measured. Moreover, the diaphragms 13a-13c have heating resistance bodies 4a-4c and temperature measurement resistance bodies 6a-6c, 7a-7c set side by side in the flow direction A of the fluid to be measured, respectively.</p> |
