| 摘要 |
PROBLEM TO BE SOLVED: To uniformly cover the surface of a magnetic film for magnetic recording by forming a carbon thin film by an ECR sputtering method as a protective film. SOLUTION: An inorganic compound layer 2 is formed by an ECR sputtering method using microwaves on a substrate 1 for a magnetic disk. By using the ECR sputtering method, the energy of the sputtered particles can be easily controlled compared to other methods, and by controlling the energy, the surface of the inorganic compound layer can be controlled to specified roughness. Then a magnetic film having the composition of Co69Cr12Pt19 is formed by a DC sputtering method as a magnetic film 3 on the disk substrate where the inorganic compound film 2 is formed. Further, a C film as a carbon protective film 4 is formed by the ECR sputtering method. By using a ring-like carbon target as the target, good magnetic characteristics can be obtd. The obtd. disk shows excellent resistance against thermal fluctuation and good coverage and density, and damages on the magnetic film can be suppressed.
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