| 摘要 |
PROBLEM TO BE SOLVED: To provide a chemical liquid treatment apparatus and a surface treatment method capable of decreasing the amount of a chemical liquid to be used and shortening the time taken for rinsing and achieving a high washing efficiency by increasing the discharge capability of an outer tank installed in the outside of an inner tank to wash an object to be subjected to surface treatment therein at the time of treating with a chemical liquid more than at the time of rinsing. SOLUTION: This single type surface treatment apparatus 1A comprises an inner tank 2 to treat the surface of an object S to be surface-treated with a chemical liquid, a chemical liquid circulation outer tank 3A with a small capacity for circulating a chemical liquid installed in an upper side in the outside of the inner tank 2, and a washing outer tank 3B with a large capacity for discharging a washing liquid and installed in the outside of the outer tank 3A. A chemical liquid supply pipeline La, a washing liquid supply pipelines Lc, and a discharge pipeline Ld are connected to the inner tank 2, a circulation pipeline Lb is connected between the chemical liquid circulation outer tank 3A and the inner tank 2, a washing liquid discharge pipeline Lh is connected to the washing outer tank 3B, and the circulation pipeline Lb is connected to the washing liquid discharge pipe line Lh through a valve 15 and a pipeline Li.
|
