RAW MATERIAL SOLUTION FOR FORMING PEROVSKITE OXIDE THIN FILM

摘要

PROBLEM TO BE SOLVED: To obtain a perovskite oxide thin film having a uniform surface shape and excellent uniformity of electric characteristics by using a raw material solution for forming a perovskite oxide thin film not using an ethylene glycol derivative. SOLUTION: In this raw material solution for forming a perovskite oxide thin film containing Ti and/or Zr, the raw material solution comprises a solution of a metal compound containing each component metal or two or more component metals, its partial hydrolyzate or its partial polycondensate in an organic solvent. The solution contains one or more kinds of butanol solvents selected from the group consisting of 1-butanol, 2-butanol, 2-methyl-1-propanol and 2- methyl-2propanol.