发明名称 Porous insulating compounds and method for making same
摘要 A method of forming a porous insulating composition comprising the steps of (A) providing at least one organic sacrificial material/dielectric material composition comprising at least one organic sacrificial material and at least one dielectric material; and (B) removing the at least one organic sacrificial material in the at least one organic sacrificial material/dielectric material composition, in order to generate pores in the at least one dielectric material. Also disclosed is a composition useful in making a porous insulator, comprising a heat-activated, pore-forming, sacrificial material; and a dielectric material. Alternatively, the composition useful in making a porous insulator, comprises at least one pore-forming, organic sacrificial material; and at least one dielectric material, wherein the at least one pore-forming, material is a norbornene-type polymer.
申请公布号 US6162838(A) 申请公布日期 2000.12.19
申请号 US19990325977 申请日期 1999.06.04
申请人 GEORGIA TECH RESEARCH CORPORATION 发明人 KOHL, PAUL A.
分类号 C09D5/25;C09D7/12;C09D145/00;C09D183/04;C09D201/00;H01L21/312;H01L21/316;H01L21/318;H01L21/76;H01L21/762;H01L21/768;H01L23/498;H01L23/522;H01L23/532;(IPC1-7):C09J9/02 主分类号 C09D5/25
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