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发明名称
Process to reduce localized polish stop erosion
摘要
申请公布号
SG77213(A1)
申请公布日期
2000.12.19
申请号
SG19990000035
申请日期
1999.01.11
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GAMBINO JEFFREY PETER;JASO, MARK, A.
分类号
B24B37/00;H01L21/304;H01L21/321;(IPC1-7):H01L21/304
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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