| 摘要 |
PROBLEM TO BE SOLVED: To provide a deaeration method requiring low operation cost even if a vacuum pump having a large exhaust volume is used. SOLUTION: A feed pipe 2 is connected to a film deaeration unit 1, to which an exhaust pipe 3 is connected. An air-liquid separation membrane 11 is provided in the unit 1 to separate the unit 1 into a liquid passage section 12 and a pressure reduction section 13. A vacuum pump 5 is connected to the section 13. A buffer tank 6 and a control valve 7 are provided between the section 13 and the pump 5, and a pressure gage 8 is provided on the tank 6 to sense the pressure in the tank 6. A control device 9 controls the opening and closing of the valve 7 and the operation of the pump 5 based on the pressure values inputted from the gage 8. By controlling the opening and closing of the valve 7 by means of the device 9, the pump 5 can be stopped even during a deaeration treatment process. |
