| 摘要 |
<p>PROBLEM TO BE SOLVED: To modify dynamic characteristics of a stage and to accelerate the speed-up of a positioning of the stage and an increase in the accuracy of the positioning of the stage, without causing an increase in the size of a stage device or the like. SOLUTION: This device is provided with a work stage movable in a two-dimensional manner along almost the vertical reference plane, a first driving mechanism 40 to move this work stage in almost a vertical first direction, a second driving mechanism to move the work stage in a second direction, a counter mass 61 of a weight to balance with that of the work stage, a pulley for windingly supporting a coupling member coupling this mass 61 with the work stage and a stage control means for controlling the position of the work stage by the mechanism 40, on the basis of a position command value A. In this case, a driving force which is imparted to the mass 61 is controlled using a third driving mechanism 80, which imparts the driving force extending along the direction almost vertical to the mass 61, and a feedforward signal, which has a value 70b to correspond to the inertia moment of the pulley and is sent, on the basis of an acceleration command value to correspond to the position command value A.</p> |
