MICROELEMENT, SUCH AS MICROINDUCTOR, MICRO-TRANSFORMER, OR THE LIKE, AND MANUFACTURE OF SUCH MICROELEMENTS

摘要

PROBLEM TO BE SOLVED: To provide a microelectric element, such as the microinductor, microtransformer, etc., having a satisfactory Q-factor or a large self-inductance value. SOLUTION: In a method for manufacturing a microelectric element, channels are formed in a substrate 1 by etching and copper segments 7 are formed in the channels. Then the upper surfaces of the segments 7 and the upper surface of the substrate 1 are made even, and at least one layer constituting a core is formed on the upper surfaces of the substrate 1 and the segments 7. Thereafter, the core is etched so that the core may be left only on bands and a plurality of arches 18 each of which couples one end of a certain segment 7, with one end of its adjacent segment 7 over the core being electrolytically grown astride over the core.