发明名称 PULSE POWER SYSTEM WITH LONG-PULSE FOR GAS DISCHARGE LASER
摘要 PROBLEM TO BE SOLVED: To increase integrated square pulse sustaining time by applying a high voltage to an electrode which generates electrical discharge on accepting a charge from a sustainer capacitor by a peaking capacitor and providing an oversaturated inductor between a sustainer capacitor and a peaking capacitor. SOLUTION: A sustainer capacitor Cp-1 with a capacity of 27nF is subjected to pulse charge at about 120 ns from a supply capacitor Cp-2 at 24nF. During this time, a spiker or a peaking capacitor Cp is insulated by an oversaturated inductor Lp-1. The inductor Lp-1 changes to its low inductance state at the end of Cp-1 charge and the capacitor Cp is subjected to resonance charge at 8nF. Since Cp is smaller than Cp-1, the voltage of Cp rises to a higher value. The high voltage of Cp destroys laser gas and generates a rapid laser pulse. When Cp is exhausted once, a discharge current is supported by Cp-1 and a second laser pulse is generated.
申请公布号 JP2000353839(A) 申请公布日期 2000.12.19
申请号 JP20000123349 申请日期 2000.03.21
申请人 CYMER INC 发明人 HOFMANN THOMAS;BRUCE D JOHANSON
分类号 H01S3/097;G03F7/20;H03K3/57;H03K17/80;(IPC1-7):H01S3/097 主分类号 H01S3/097
代理机构 代理人
主权项
地址