| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser defect correcting method and a laser defect correcting device capable of realizing high-quality defect correction without damaging a base plate by surely preventing particles scattered at the time of laser transpiration with simple constitution from adhering to the base plate again. SOLUTION: This device is provided with a laser 2 generating a laser beam; a slit 3, a relay lens 4 and an objective lens 5 for shaping the laser beam based on the shape of a defect part being a part to be removed out of a film on the surface of the base plate 1 and radiating it to the defect part; an inonizer 7 electrifying the defect part before radiating the laser beam to the defect part; an X-Y stage moving the base plate 1 to a position where the laser beam from the lens 5 is radiated to the defect part; and a control part controlling the laser beam radiated to the defect part to intensity that the defect part is transpired and removed.</p> |
