| 摘要 |
PROBLEM TO BE SOLVED: To obtain an IC testing apparatus in which light is transmitted between a tester body and a test head and in which a test signal having an extremely small jitter is generated. SOLUTION: Optical clock signals are generated from optical pulse sources 23A, 23B, 23C by reference clocks ACLK, BCLK, CCLK. In light changeover switches 28A, 28B, 28C, the optical clock signals are incident on either waveguides, for rise, 26A, 26B, 26C or waveguides, for fall, 27A, 27B, 27C according to the rise or the fall of a generated waveform. The waveguides, for rise, 26A, 26B, 26C are multiplexed by a multiplexing waveguide 29 so as to be coupled to an optical fiber, for rise, 32. The waveguides, for fall, 27A, 27B, 27C are multiplexed by a multiplexing waveguide 31 so as to be coupled to an optical fiber, for fall, 33. An electric test signal which rises by an optical clock from the optical fiber 32 and which falls by an optical clock from the optical fiber 32 is generated on the side of a test head 13.
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