| 摘要 |
PROBLEM TO BE SOLVED: To perform desired processing by applying a desired physical action to a medium without being affected by deposits on an end of a probe, by forming a deposit removal mechanism for a probe end out of, at least, two surfaces and their crossing line, the two surfaces making a cross angle smaller than the angle made by a plane parallel to a surface of the medium with a plane normal thereto. SOLUTION: Relative position between a probe and a medium is controlled with a position control means, and a physical action is applied to the medium by a physical action applying means to change the condition of a surface of the medium, thus microscopically processing the medium. A deposit removal mechanism has two sets of surfaces making crossing angles, and preferably, the crossing line of one set is adapted to make an acute angle with the crossing line of the other set. With the probe 101 in contact with or in proximity to the crossing line 108, the probe 101 is moved parallel to a surface 102 parallel to the surface of the processed medium to remove deposits. Preferably, the physical action applying means is equipped with a structure for applying a physical action to the processed medium according to output of a coding means that performs coding based on prepared information.
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