| 摘要 |
PROBLEM TO BE SOLVED: To surely and easily estimate a device or a step causing failures by comparing an image information obtained from the computation of a finish inspection result and an intermediate inspection result of products, a work result information of products at each step, and an information on failure distribution by device with each other. SOLUTION: A computer 3 for estimating cause of a failure is connected with a computer 9 for computing an inspection result, a computer 2 for progress control and a computer 11 for computing an intermediate inspection result via a network 4, and it picks up necessary information from the respective computers 9, 2 and 11 and then computes it to estimate a device or a step causing the failure, and a processed result is indicated in a display device 14 provided in the computer 3. Furthermore, a finish distribution information especially related to this device or an information related to contact position of a wafer, in which the wafer is given a mechanism destruction when a transfer mechanism, etc., in the device are brought into contact with the wafer, is stored/ registered in advance in a means 13 for storing an information of failure distribution by a device which is connected with the computer 3.
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