| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a piezoelectric accelerometer whose measuring accuracy is high. SOLUTION: An electrode EP1, for pyroelectric-effect detection, which is not connected electrically to an electrode pattern for acceleration detection is formed on a stress nongenerating region 8C2 in which a stress is not generated substantially when an acceleration acts on the plumb hob of a piezoelectric ceramic substrate 7a. A counter electrode, for pyroelectric-effect detection, which faces the electrode EP1 for pyroelectric-effect detection is formed on the rear of the piezoelectric ceramic substrate 7a. A part which is situated between the electrode EP1, for pyroelectric-effect detection, on the piezoelectric ceramic substrate 7a and the counter electrode for pyroelectric-effect detection is polarization-treated. On the basis of an electric charge which is generated across the electrode EP1 for pyroelectric-effect detection and the counter electrode for pyroelectric-effect detection, a signal change portion generated by a pyroelectric effect is found. The signal change portion is subtracted from an acceleration detection signal, and the acceleration detection signal is corrected.</p> |
