| 摘要 |
A charged particle beam test system has improved voltage measurement accuracy when irradiating a charged particle beam upon predetermined portion of a device under test (DUT) and detecting secondary electron detected therefrom representing a voltage of the irradiated portion of the DUT. The test system includes a DUT driver for supplying a test signal to the DUT to cause the voltage at the irradiated portion and generating a trigger signal, a sampling pulse generator for continuously generating a sampling pulse having a predetermined time interval to drive the charged particle beam, a time difference detector for detecting a time difference between the trigger signal and the sampling pulse, an address data generator for generating address data corresponding to the time difference, and a test result memory for storing measured data representing an amount of the secondary electron emitted from the irradiation portion of the DUT in addresses specified by the address.
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