METHOD FOR MANUFACTURING A CAPACITOR HAVING A METAL STORAGE ELECTRODE

摘要

PURPOSE: A method for manufacturing a capacitor having a metal storage electrode is provided to reduce a thickness of an effective oxidation layer of a dielectric layer and to improve a leakage current characteristic, by cleaning a storage electrode before forming a dielectric layer to eliminate an oxidation layer existing on the surface of the storage electrode. CONSTITUTION: A storage electrode of a capacitor is formed with a metal material. A cleaning process is performed to eliminate an oxidation layer on the storage electrode. A dielectric layer is formed on the storage electrode. A plate electrode is formed on the dielectric layer. The storage electrode can be formed with tungsten.