METHOD FOR MANUFACTURING A MICRO STRUCTURE

摘要

PURPOSE: A method for manufacturing a micro structure is provided to decrease an actuation voltage of a side drive micro actuator to increase an actuation force and to increase a sensitivity of a capacitance-type sensor, by embodying a moving micro structure having a high aspect ratio by a selective plating. CONSTITUTION: A sacrificial layer having a predetermined shape is formed on a substrate having an insulating layer. A seed layer having a predetermined shape is formed on the sacrificial layer and insulating layer to expose a part of the sacrificial layer. A plating frame is formed on the exposed sacrificial layer. A metal layer is plated on the seed layer. The sacrificial layer and plating frame are eliminated.