INSPECTION EQUIPMENT OF SEMICONDUCTOR DEVICE AND METHOD OF INSPECTION

摘要

PURPOSE: An apparatus and a method for testing a semiconductor wafer are provided to test a pattern of a wafer by analyzing an alignment state of an alignment mark formed on a wafer. CONSTITUTION: A wafer alignment portion(12) aligns wafers by driving a stage for loading the wafers. An image processing portion(14) performs the image processing for regions having an align marks of patterns of the wafers. A control portion(16) controls the wafer alignment portion(12) and analyzes an alignment state of the align marks according to received image signals. A transfer portion(10) transfers the wafers from a cassette to a stage or from the stage to the cassette. A particle test portion(18) tests particles on the wafer.