发明名称 LIGHTLY DOPED DRAIN METAL-OXIDE-SILICON FIELD EFFECT TRANSISTOR AS A RESISTOR AND A MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A lightly doped drain metal-oxide-silicon field effect transistor(LDD MOSFET) as a resistor is provided to manufacture a variable resistor having a linear characteristic without a modification or additional process, and to have the resistor occupy a relatively small area on a silicon substrate as compared with other resistors. CONSTITUTION: A lightly doped drain metal-oxide-silicon field effect transistor(LDD MOSFET) as a resistor comprises a semiconductor substrate(100), a gate oxidation layer(101), a gate electrode(102), a low density region of the first conductivity type(103) and a high density region of the first conductivity type(104). The gate oxidation layer is formed on the substrate. The gate electrode is formed on the gate oxidation layer. The low-density region is formed on the substrate adjacent to the gate electrode. The high-density region is formed in the substrate on both sides of the gate electrode.
申请公布号 KR20000074360(A) 申请公布日期 2000.12.15
申请号 KR19990018257 申请日期 1999.05.20
申请人 HYUNDAI MICRO ELECTRONICS CO.,LTD. 发明人 MO, GYEONG GU
分类号 H01L29/78;(IPC1-7):H01L29/78 主分类号 H01L29/78
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