| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detector which obtains an actual picture of high precision to improve the defect detection sensitivity. SOLUTION: Before inspection, a reticle where a pattern with preliminarily determined dimensions inputted from a picture input means 1 drawn while being shifted by a certain pitch, and a pitch correction table is generated by a correction table generation means 2. At the time of inspection, the pitch correction table generated by the correction table generation means 2 is used, and pitch correction is applied to an input picture by a pitch correction means 3 to correct the pitch distortion, thus reducing false defects to improve the inspection sensitivity. |
