| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a mask stage drive mechanism which has a three-degree of freedom configuration of X, Y andθaxes, a flat structure and also the optical path with a large hole diameter at the center and which also can realize a high accurate trajectory following performance and positioning. SOLUTION: This mechanism is provided with a fixed base plate 1 having the opening corresponding to an opening for an optical path, aθaxis movable part 4 which has an opening corresponding to the opening for the optical path and which is formed in a rotatable way around a Z axis perpendicular to X and Y axes through cross roller bearing 3 provided in the opening part of the plate 1, a Y axis movable part 7 which has an opening corresponding to the opening for the optical path and which is attached to the part 4 in a movable way in Y axial direction, and an X axis movable part 10 which has an opening corresponding to the opening for the optical path and which is attached to the part 7 in a movable way in an X axial direction. A position detector detects the positions of the respective movable parts, and the feedback control systems provided in the respective movable parts perform positional control.</p> |
