| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an intra-vacuum linear actuator drive mechanism which realizes a large stroke and can realize very fast and highly accurate positioning and high trajectory following accuracy. SOLUTION: This mechanism includes an X axis linear motor 8 and Y axis linear motors 18 and 23 which drive a stage that is arranged in a chamber 100 and that is for mounting a work in the directions of X and Y axes, an X axis linear bearing 7 and Y axis linear bearings 15 and 20 guiding the movement of X and Y axial bases 6 and 14, an X axial linear encoder 10 and Y axial linear encoders 16 and 21 for detecting the positions of the bases 6 and 17, and a position controller which calculates command values to the respective linear motors from the position detection values from the respective linear encoders and the controlled variable target values for respective positions, and a controller for controlling the respective linear motors in a feedback control system.</p> |
