| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage controller capable of performing highly accurate control. SOLUTION: A target position generator 40 generates a reference signal RS1, for instance, for a wafer stage unit WS. A controller 44 controls the movement of a stage in accordance with a control signal CS1. A laser interference device 32 detects the position of the stage, and a feedback signal FS1 is generated. An operating part 43 outputs a deviation signal corresponding to the difference between the reference signal RS1 and the feedback signal FS1. A compensating circuit 49(#1) eliminates a specific frequency band component included in the deviation signal ES1 and outputs the control signal CS1.
|
