摘要 |
PROBLEM TO BE SOLVED: To enable a semiconductor laser element to stably make high-output operations by suppressing the COD (optical damage) deterioration of the end face of a resonator. SOLUTION: On the end face of a resonator, an oxide film 15 is formed by evenly oxidizing a semiconductor material exposed on the end face. In the vicinity of the end face of the resonator, in addition, no-current injecting areas are provided in an active layer by oxidizing clad layers 3 and 5. The oxidation of the clad layers 3 and 5 is performed by exposing the resonator to high- temperature steam of 300-600 deg.C in temperature, etc., and so on.
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