SYNTHESIZED AUTOMATION SYSTEM FOR MANAGING A SEMICONDUCTOR LINE AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A synthesized automation system for managing a semiconductor line is provided to correct defective data, by directly having an operator handle every data regarding the semiconductor line. CONSTITUTION: A synthesized automation system for managing a semiconductor line comprises a process master unit(1), a history unit(2), an external manufacturing execute unit(5), a station control unit(3) and a transfer unit(4). The process master unit receives each transaction data generated in the semiconductor line, and directly handles and manages respective data necessary for a wafer process. The history unit receives and stores the transaction data from the process master unit, and monitors and manages a wafer state progressed according to an order of a client. The external manufacturing execute receives and stores the data applied from the history unit. The station control unit performs an interface between a host computer and individual equipment for manufacturing a wafer, and outputs respective data regarding the equipment. The transfer unit performs a transfer between processes, and performs an interface between the host computer and a transfer equipment while controlling a wafer transfer in the line and outputting respective data regarding a wafer loading to the process master unit.