| 摘要 |
PURPOSE: A microgyroscope is provided to minimize force transmitted by an external vibration by vibrating three mass parts in a gyroscope and compensating vibrations of the mass parts in the opposite directions to minimize frictional loss of a supporting part, thereby improving resolution of the gyroscope and extending the lifespan of the gyroscope. CONSTITUTION: A microgyroscope includes an inner frame(140) mounted in an outer frame(120) to be excited with the outer frame integrally and having an inner mass part(110), a plurality of combs(150) traversely mounted at both sides in the inner frame in y-axis direction, vertical direction sensing electrodes(170) disposed between the combs with a predetermined interval and supported by an electrode supporting part(160), outer mass parts(210,210') mounted at both sides of the inner mass part, an elastic element(230) mounted between the outer frame of the inner mass part and the outer mass parts to be excited, a vibration structure(220) extendable in a width direction of the outer mass parts, a plurality of combs(240) mounted at one side of the vibration structure, and an exciting actuator(250) for initiating exciting operation as a voltage is applied and mounted with combs(260) for detecting the exciting state.
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