| 摘要 |
PROBLEM TO BE SOLVED: To ensure stabilized resonance regardless of the shaking voltage by damping interference of an applying voltage with a shaking comb driver through an asymmetric comb sensor. SOLUTION: A beam resilient body 130 placed between inner and outer frames 110, 120 detects oscillation in the sensing direction due to Coriolis force based on the difference of capacitance between a sensing electrode 170 and a comb 150 when the inner frame 110 oscillates in the sensing direction (Y axis). The outer frame 120 is shaken with an electrostatic force generated between shaking comb drivers 250, 250' and a plurality of frame section shaking combs 220 shakable in the shaking direction (X axis) provided on the outside of the outer frame 120. Asymmetric comb sensors 270, 270' for sensing the oscillation in the shaking direction cancels the interference shaking voltage of a signal transmitted through the outer frame 120 with a shaking voltage when the shaking combs 220 are shaken through the shaking comb drivers 250, 250'. Consequently, the effect of interference can be eliminated. |
