发明名称 HIGH FREQUENCY ENERGY SUPPLY DEVICE AND HIGH FREQUENCY ELECTRODELESS DISCHARGE DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress corona discharge generating at the tip of a conductive projection part by suppressing generation of abnormal discharge in the vicinity of at least one tip of plural conductive projection parts contained in a side cavity resonator group. SOLUTION: A suppressing means for suppressing generation of abnormal discharge is installed in the vicinity of at least one tip of plural conductive projection parts contained in a side cavity resonator group. As the suppressing means, the corner of a tip 21 of a vane 14 is rounded or chamfered to reduce an inequality electric field at the tip of the vane 14. The tip of the conductive projection part may be evacuated or pressed, and by this, generation of abnormal discharge in the vicinity of the tip of the conductive projection part can be suppressed or prevented. Moreover, the tip of the vane may be covered with a dielectric, and by this, break down voltage in a gap at the tip of the vane is increased, and unnecessary corona discharge can be suppressed.
申请公布号 JP2000348889(A) 申请公布日期 2000.12.15
申请号 JP19990261281 申请日期 1999.09.14
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 HOCHI AKIRA;TAKEDA MAMORU
分类号 H01J65/04;H05B41/24;(IPC1-7):H05B41/24 主分类号 H01J65/04
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