发明名称 |
EQUIPMENT FOR TESTING SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: An equipment for testing a semiconductor device is provided to improve efficiency through testing more than one device at the same time. CONSTITUTION: A tube(201) is fixed to a dual inline package supplier(270). The tube faces upward from a support plate(210). Dual inline packages are stored in store grooves(235) of a store stage(230). A guide transferor(248) transfers a pickup(245) to the grooves. A vacuum adsorb module adsorbs the packages. The pickup is transferred to a test unit(250). The packages are settled in test apparatuses(255) to be tested. The pickup arranges the packages in front of a dual inline package guide member(264) according to test results. A cylinder rod pushes the packages to the guide member. |
申请公布号 |
KR20000074834(A) |
申请公布日期 |
2000.12.15 |
申请号 |
KR19990019048 |
申请日期 |
1999.05.26 |
申请人 |
SAMSUNG ELECTRONICS CO, LTD. |
发明人 |
SHIN, HYEON CHUNG;YOO, SU YEOL |
分类号 |
G01R31/26;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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