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发明名称
APPARATUS FOR THE EPITAXIAL GROWTH COMPRISING A PLURALITY OF BOARD HOLDERS
摘要
申请公布号
KR100275366(B1)
申请公布日期
2000.12.15
申请号
KR19980041734
申请日期
1998.10.02
申请人
KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
LIM, YONG-MIN;KANG, KYUNG-IN;KIM, I-EUL;JANG, HYUN-SUK;MIN, KYUNG-UK
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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