| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a uniform and high quality SNS(superconducive-normal-superconductive) Josephson junction. SOLUTION: This is a method for using ion injection for preparing a normal layer in an SNS Josephson junction 10. The SNS junction 10 to be obtained by this method includes a first high temperature superconductive(HTS) layer 14 accumulated and pattern-formed on a substrate 18, and the first HTS layer 14 is selectively removed so that the upper face of the substrate 18 can be exposed, and a side face forming a corner on the surface of the first HTS layer 14 is formed so as to be made adjacent to the exposed upper face of the substrate 18. A joint region 12 having non-superconductivity is formed along the side face forming the corner of the first HTS layer 14. Then, a second HTS layer 16 is accumulated and pattern-formed on at least one part of the first HTS layer 14 and the exposed upper face of the substrate 18 so that the SNS Josephson junction can be formed.
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