摘要 |
PROBLEM TO BE SOLVED: To make an antiferromagnetic film thinner and to minimize the degradation in characteristics by a heat treatment. SOLUTION: This process for producing the spin valve film formed by laminating a first magnetic film, a nonmagnetic film, a second magnetic film and the antiferromagnetic film formed by a Pt-Mn alloy consists in subjecting the antiferromagnetic film to the heat treatment within a range enclosed by four points; the point A (280 deg.C, 15 nm), point B (310 deg.C, 15 nm), point C (280 deg.C, 30 nm) and the point D (280 deg.C, 30 nm) in a graph with which the heat treatment temperature of the antiferromagnetic film is taken at the abscissa and the thickness of the antiferromagnetic film as the ordinate.
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