SEMICONDUCTOR DEVICE PROBE STATION, ITS COOLING APPARATUS, ITS COOLING METHOD, AND EDS METHOD THEREOF

摘要

PURPOSE: A semiconductor probe station, an apparatus an a method for cooling the same, and an EDS(Electrical Die Sorting) method thereof is provided to test a state of a chip by checking electrical characteristics of each chip formed on a wafer. CONSTITUTION: An EDS process is performed to test a normal state or an abnormal state of a chip in a semiconductor probe station. A cooling device(36) is included within the semiconductor probe station. In the probe station, a station performs the EDS process. A platen(26) is formed on the station. A forcer(28) is formed on the platen(26). A mobile portion moves the forcer(28). A probe chuck(30) is installed on the forcer(28). A wafer(16) is adsorbed on an upper face of the probe chuck(30) according to an operation of a vacuum device. The cooling device(36) falls down a temperature of the probe chuck(30).