| 摘要 |
PROBLEM TO BE SOLVED: To enable a second electrode to be easily and finely processed so as to scale down a device in size by a method wherein the second electrode is formed of one of precious metal elements, one of transition metal elements, and a second electrode oxygen-containing layer which contains oxygen-containing material represented by a specific composition formula. SOLUTION: A dielectric capacitor 10 is supported with a base 11, and a lower electrode 12 and an upper electrode (second electrode) 14 are connected to a dielectric film 13. The second electrode 14 is composed of an oxygen-containing layer 14a as thick as 200 nm or so and a precious metal layer 14b which is provided between the layer 14a and the dielectric film 13 and as thick as 20 nm or so. The oxygen- containing layer 14a contains at least one element selected out of a precious metal element group, at least one element selected out of transition metal elements composed of hafnium, tantalum, zirconium, niobium, vanadium, molybdenum, tungsten, and rare earth elements, and oxygen-containing material (MIaMIIbOc, MI: precious metal element, MII: transition metal element). At this point, in a composition formula, MIaMIIbOc, which indicates the composition of oxygen-containing material by atom%, a, b, and c are so set as to satisfy formulas, 90>=a>=4, 15>=b>=2, c>=4, and a+b+c=100. |
