ACTIVE MATRIX ARRAY SUBSTRATE AND ITS PRODUCTION

摘要

PROBLEM TO BE SOLVED: To improve the production yield by preventing electrostatic breakdown between scanning lines and data lines or between adjacent data lines in the production process. SOLUTION: This substrate has active elements arranged in a matrix and a plurality of scanning lines 4 and data lines 5 to drive the active elements. Each scanning line 4 is connected through an inspection resistor 12 for the scanning lines to a common scanning bus 10, while each data line 5 is connected through an inspection resistor 13 for the data lines to a common data bus 11. Each data line 5 consists of a multilayered metal layer, and each of the inspection resistor 12 for scanning line and the inspection resistor 13 for the data line consists of the lowermost metal layer of the multilayered metal layer.