| 摘要 |
PROBLEM TO BE SOLVED: To improve sensitivity in a low magnetic field by increasing a magnetic concentration effect to a magnetoelectric converting element part. SOLUTION: A Hall element part 15 is formed on the surface of a silicon substrate 11, and a first magnetic body film 23 is formed on the surface of an etched groove 19 formed at the back side of the silicon substrate 11, and a second magnetic body film 27 is formed on the surface of an etched groove 19a formed at a silicon substrate 11a, and the silicon substrate 11a in which a second magnetic body film 27 is formed is adhered to the surface side of the silicon substrate 11 by a polyimide layer 25 so that this element can be formed. In this case, both magnetic body films 23 and 27 are formed so that the Hall element 15 can be interposed. Thus, an outer magnetic field can be efficiently concentration to the Hall element 15 by the first magnetic body film 23 and the second magnetic body film 27.
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