SEMICONDUCTOR TESTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To obtain a semiconductor testing apparatus which shortens the time required for judging whether the defective bit of a semiconductor memory can be relieved or not and which reduces the memory capacity of a defective-bit storage memory. SOLUTION: In this semiconductor testing apparatus, a row defective-bit storage memory 3 which corresponds to a spare row circuit and a column defective-bit storage memory 5 which corresponds to a space column circuit are installed separately, and defective bits of the defective-bit storage memories are counted respectively by a row defective-bit counter 4 and a column defective-bit counter 6. Whether a defective row can be relieved or not and whether a defective column can be relieved are judged by using the row defective-bit storage memory and the column defective-bit storage memory.