发明名称 |
A TEST-TRAY TRANSFER DEVICE IN A COOLING CHAMBER OF HORIZENTAL HANDLER |
摘要 |
PURPOSE: A test tray transfer device in a cooling chamber of a horizontal handler is provided to reduce equipment area by installing the cooling chamber on top of the test site. CONSTITUTION: A first elevator installed at a test site descends a test tray installed beneath an operating track to the direction of a cooling chamber. A guide is installed on the base(42) of the cooling chamber. A transferor equipped with a shift bar(45) transfers the test tray delivered by the first elevator to the bottom direction of a rotator of an unloading part. A second elevator installed at a vertical direction of the rotator elevates the test tray transferred in a vertical direction by the rotator toward the rotator.
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申请公布号 |
KR100273984(B1) |
申请公布日期 |
2000.12.15 |
申请号 |
KR19980015706 |
申请日期 |
1998.04.30 |
申请人 |
MIRAE CORPORATION |
发明人 |
KIM, DU-CHUL |
分类号 |
G01R31/26;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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