| 摘要 |
PURPOSE: A microgyroscope is provided to minimize a veering phenomenon generated when tuning frequencies in excitation and sensing directions by separating vibrations of exciting and sensing modes, thereby maximizing resolution and sensibility of the microgyroscope and extending the lifespan of the microgyroscope. CONSTITUTION: A microgyroscope includes an inner frame(110) excitably mounted in an outer frame integrally, a plurality of combs(150) traversely mounted at both sides in the inner frame toward a sensing direction, sensing direction sensing electrodes(170) disposed between the combs with a predetermined interval and fixedly supported by upper and lower electrode supporting parts(140,160), a beam elastic element(130) mounted between the inner and outer frames to be excited in the sensing direction, a first exciting elastic element(230) elastically mounted in the outer frame to be excited in an exciting direction(x-axis), a plurality of combs(220) mounted at both sides of the outer frame, and exciting actuators(250,250') for initiating exciting operation as a voltage is applied.
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