| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared detection element producing a precise image and having a bolometer section which can be patterned finely without increasing noise. SOLUTION: The infrared detection element 20 comprises a supporting film 2 supported on a semiconductor substrate 1 through a supporting leg 13 while being isolated thermally from the semiconductor substrate 1, and first and second electrodes 3a, 3b formed on the supporting film 2 wherein a plurality of bolometer films 4a, 4b and insulating bonding films 5 are formed alternately in layers. The bolometer films 4a, 4b are connected electrically through holes 6 made in the bonding films 5 thus forming a bolometer section 4.
|
