METHOD AND APPARATUS FOR DETECTING PARTICLES ON THE STAGE HOLDER

摘要

PURPOSE: A method and an apparatus for sensing particles on a stage holder of an exposure system for manufacturing a semiconductor device and a method for controlling the same are provided to improve the productivity by removing particles from a stage holder. CONSTITUTION: A decision portion(3) decides a location declination at a specific location of a stage holder. An input portion(32) receives a location declination signal as an analog signal of the location declination signal. An output portion(34) outputs the analog signal of the location declination signal to a digital signal of the location declination signal. An error display portion(36) displays an error according to the decision of the location declination signal. An alarm portion(38) generates an alarm for reporting the error.