ALIGN KEY FOR FORMING A CAPACITOR

摘要

PURPOSE: An align key for forming a capacitor is provided to prevent a seam caused by a defective step coverage of an oxidation layer and to prevent the seam from being lifted after a cleaning process, by having the align key include a dot pattern and line patterns. CONSTITUTION: An alignment key for forming a capacitor includes a plurality of dot patterns. The plurality dot patterns are disposed to have a line shape, and the line-shaped dot patterns are arranged to have a box shape. The width of each dot pattern is of the scope from 0.3 to 0.5 micrometer.