| 摘要 |
PROBLEM TO BE SOLVED: To make detectable a signal value without preparing a new template when detecting the signal value generated from a spot position of a test piece using a template, even if a test piece with a different spot position is used. SOLUTION: Plural kinds of templates T are stored on a template storing means 12 corresponding to a plurality of kinds of test pieces with different spot position arrangements. For performing analysis with an analyzing means 11, the template T where ROI is placed at a position corresponding to the spot position of a used test piece is read out from the template storing means 12, this template T is set to an image shown by marking data S1, S2, and a signal value at a position corresponding to the ROI of the template T is detected for evaluation.
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