| 摘要 |
PROBLEM TO BE SOLVED: To easily fix a filmy sample without having affection a measurement result by charging static electricity generated on a sample-contacting surface by a static generation part, and attracting the sample for fixing. SOLUTION: When a voltage supply part 12 is turned on and a voltage is applied between a positive electrode and a negative electrode, static electricity is generated. An attraction surface part charges static and attracts and fixes a sample 11 on the attraction surface part. When the sample 11 is deformed due to warpage and hardly adhere to the attraction surface part, voltage being applied between the positive and negative electrodes is increased by a control part 13 for increasing the amount of static electricity, thus fixing the sample 11. Then, a load-switching knob is rotated and a load to be applied to the sample 11 is set, and a penetrator is pressed to the sample 11 fixed on the sample stand. Then the penetrator is returned, a turret is rotated for switching from the penetrator to an objective lens, and an indentation formed by the penetrator is observed by a micrometer microscope, therey the hardness of the sample 11 can be calculated and an accurate measurement result can be obtained.
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