摘要 |
PROBLEM TO BE SOLVED: To measure the diameter of each hole in a member having holes of different diameter by detecting the fluid pressure when the member is placed in a noncompressive fluid in a reservoir and the quantity of fluid is varied by varying the fluid pressure. SOLUTION: A tip nozzle 13 having holes 14a-14c of different diameter is placed in a reservoir 2 and mercury L in the reservoir 2 is pressurized gradually at a predetermined rate in a pressurizing unit 8. The mercury L does not flow into each hole when it is not pressurized and when the mercury pressure P detected by a pressure sensor 10 reaches a some level PcL, the mercury L flows into the hole to move a pressurizing rod 9 and a moving amount sensor 11 detects the quantity of mercury being varied. Average pressure Pc of the PcL and a slightly higher pressure PcH is set as a mercury inlet pressure and an electronic controller 12 calculates the diameter of the hole 14c from the mercury inlet pressure Pc based on a prestored relation map of the mercury pressure P and the hole diameter. Furthermore, the mercury pressure P is increased and variation in the quantity of mercury is detected at a pressure Pb higher than the inlet pressure Pc and at a pressure Pa higher than the Pb. Diameters of the holes 14b, 14a are calculated based on the pressures Pb, Pa, respectively.
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