| 摘要 |
PROBLEM TO BE SOLVED: To properly set a clean pace having high cleanliness and to facilitate building. SOLUTION: An upper plenum chamber 2 wherein air passing through a chemical filter 9 is fed in a clean space 1 after the passage of it through a ULPA filter 6, a lower plenum chamber 3 to suck clean air in the clean space 1, and a return haft 4 to intercouple the upper and lower plenum chambers 2 and 3 comprises respective assemblies each comprising a plurality of units. Simultaneously, a circulation passage for a clean air to the clean space 1 is composed of the upper plenum chamber 2, the lower plenum chamber 3, and the return shaft 4.
|
