| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce the operating time required for finding out the optimum point of an initial optical-axis adjustment when a lamp is replaced by a method wherein information of a proper position when a discharge lamp filled with mercury or a rare gas is installed is described on the lamp itself. SOLUTION: When a lamp which is provided with a cathode base 5 and an anode base 6 is manufactured, the lamp is first assembled, the tip position of a cathode is then measured by using a tip-position measuring mechanism, and alignment marks Zd, Xa, Yb, Yc which reflect its data are recorded on a lamp base part (the cathode base 5). Then, when the lamp is turned on in an aligner, the alignment marks are first detected by using the lamp base part or the like so as to be stored as mark position data. In addition, the manufacturing error offset of the aligner is read out, the coarse adjustment of an optical axis is performed on the basis of a value to which the mark position data is added, and the lamp is turned on after that.</p> |
