PEDESTAL OF VERTICAL VAPOR DEPOSITION DEVICE,申请号KR19980045735-传众专利搜索

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发明名称	PEDESTAL OF VERTICAL VAPOR DEPOSITION DEVICE
摘要
申请公布号	KR100275747(B1)	申请公布日期	2000.12.15
申请号	KR19980045735	申请日期	1998.10.29
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	WOO, SUNG-OH;JANG, JONG-KI
分类号	H01L21/20;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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